New PDF release: Microcantilevers for Atomic Force Microscope Data Storage
By Benjamin W. Chui
Microcantilevers for Atomic strength Microscope facts Storage describes a learn collaboration among IBM Almaden and Stanford collage within which a brand new mass info garage know-how was once evaluated. This expertise relies at the use of heated cantilevers to shape submicron indentations on a polycarbonate floor, and piezoresistive cantilevers to learn these indentations.
Microcantilevers for Atomic strength Microscope info Storage describes how silicon micromachined cantilevers can be utilized for high-density topographic facts garage on an easy substrate similar to polycarbonate. The cantilevers will be made to include resistive warmers (for thermal writing) or piezoresistive deflection sensors (for facts readback).
the first viewers for Microcantilevers for Atomic ForceMicroscope info Storage is commercial and educational employees within the microelectromechanical platforms (MEMS) region. it is going to even be of curiosity to researchers within the info garage who're investigating destiny garage technologies.
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Additional info for Microcantilevers for Atomic Force Microscope Data Storage
B. W. 2 Heater design and fabrication ------------------------------- The cantilevers are designed to incorporate a lightly doped heating element at the tip. The fabrication process, shown in Fig. 2, is adapted from Tortonese, et al. 1]. 2] with a 5 11m top silicon layer, with background phosphorus doping of approximately 1016/cm 3. In Fig. 2a, an SF6 plasma etch is used to undercut an oxide-resist mask to form a blunt tip, which is then sharpened by low-temperature oxidation (Fig. 2b). In Fig.
Steady-state measurements of the I-V characteristics of the heater-cantilever gave a curve with two different sections. A lumped-element model involving thermal runaway in silicon was developed to help explain the phenomenon. The model Heater-cantilevers for writing: design. fabrication and basic characterization 27 Heater-cantllevera for writing: design, fabrication and basic characterization indicates that at high temperatures, the intrinsic carrier concentration in the heater region exceeds the external dopant concentration, leading to a marked decrease in electrical resistance.
6 Heater-cantilevers for writing: design,fabrication and basic characterization 19 Heater-cantllevera for writing: design, fabrication and basic charact8rlzation In the second method, 1 ~s voltage pulses were applied to the cantilever once every millisecond and a lOOn sense resistor was put in series with the cantilever to allow the instantaneous current to be measured with an oscilloscope. The voltage level was varied between 0 and IO V. The resulting I-V curve is shown in Fig. 6 (curve (b)). This time the curve is a straight line of constant positive slope passing through the origin, typical of a simple resistor.
Microcantilevers for Atomic Force Microscope Data Storage by Benjamin W. Chui